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High-Sensitivity Whispering Gallery Mode Humidity Sensor Based on Glycerol Microdroplet Volumetric Expansion

2021

We demonstrate a highly sensitive whispering gallery mode (WGM) relative humidity (RH) sensor based on a glycerol microdroplet. WGMs were excited using a 760 nm tunable semiconductor laser. We used free space coupling, which is effective when using a liquid resonator. A detailed analysis of different parameters influencing the sensor’s characteristics (sensitivity, hysteresis, resolution, stability, and temperature) is presented. The sensitivity of the sensor is one of the highest reported (2.85 nm/% RH in the range 50–70% RH with the resolution 1 × 10−4% RH). This type of humidity sensor has several advantages, such as high sensitivity, extended lifetime, good repeatability, and low cost, …

tunable laserMaterials science02 engineering and technologyglycerollcsh:Chemical technology01 natural sciencesBiochemistryArticleAnalytical Chemistrylaw.invention010309 opticsResonatorlaw0103 physical sciencesRelative humiditylcsh:TP1-1185Sensitivity (control systems)humidity sensorElectrical and Electronic EngineeringInstrumentationbusiness.industryHumidity021001 nanoscience & nanotechnologyLaserAtomic and Molecular Physics and OpticsSemiconductorOptoelectronicsWhispering-gallery wave0210 nano-technologybusinessmicrosphere resonatorTunable laserwhispering gallery modeSensors
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